產(chǎn)品概述:
|
Z軸最大測量范圍 |
SA-41 5mm/SA-32 8mm |
|
X軸最大測量范圍 |
100mm |
|
Z軸最小分辨率 |
7.5nm/12nm |
|
直線度精度 |
0.4μm/100mm |
|
檢出器 |
PU-FK1A |
|
觸針 |
SA-41 R2μm 60°/SA-32 R25μm 25° |
|
設備尺寸 |
W1500×D800mm |